And the single-chamber microelectromechanical system atomic vapor cell as the key component is fabricated by utilizing deep silicon micromachining and anodic bonding techniques. This proposed ...

1997), ion implantation (De Maeztu et al., 2003), or anodic oxidation (Matykina et al., 2007), which are accessible to enhance and modify the surface chemistry of an implant. Among all these ...